Ionic properties of ultrathin yttria-stabilized zirconia thin films fabricated by atomic layer deposition with water, oxygen, and ozone
By Ho Keun Kim and Dong Young Jang and Jun Woo Kim and Kiho Bae and Joon Hyung Shim
Published in Thin Solid Films
2015
Abstract
We compared the ionic properties of yttria-stabilized zirconia (YSZ) thin films prepared by atomic layer deposition (ALD) using various oxidants including water, oxygen, and ozone. Cross-plane conductivity measurements were performed at low temperature (50